• Optical piezo vertical stage

Optical piezo vertical stage

1. Offers 1 kind of travel range which is 10 mm
2. The maximum loading is 150 g
3. High-precision 1 nm and standard 100 nm typical resolution
Model : Standard series:PST8E310A High precision series:PST8E110A

The optical sensing element is applied as the core for position feedback. This product series is suitable for any application requiring high-precision positioning and motion control. It contains not only reliable and stable positioning abilities but also various resolution options.



         Minimum incremental motion (Standard Linear Series)       

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         Minimum incremental motion (High Precision Linear Series)       


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Motion Performance

Max. speed
10 mm/s
10 mm/s
Encoder option
Open loop
Closed loop
Encoder resolution
N/A
0.1 µm (Standard Series)
1 nm (High Precision Series)
Min. incremental motion
N/A
0.3 µm (Standard Series)
15 nm (High Precision Series)
Bidirectional repeatability
N/A
0.5 µm (Standard Series)
50 nm (High Precision Series)

Mechanical Properties

Max. load
150 g
Max. Axial load
150 g
Guide type
Crossed roller bearings
Pitch
±200 µrad
Yaw
±100 µrad


Options

Material
Anodized aluminum as standard ; Stainless steel
Vacuum
Atmospheric as standard ; HV (1E-6 mbar)
Home function
Yes
Limit function
Yes



Type

Drawing

Download


Type 10:Travel 10 mm

pst8e110a_pst8e310a_300x225.jpg

  (Standard Series : PST8E310A)
(High Precision Series : PST8E110A)


pst8e110a_pst8e310a_600.jpg



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Semiconductor industry Biomedical Optoelectronics/Optical Communication Industry

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