Optical piezo vertical stage
2. The maximum loading is 150 g
3. High-precision 1 nm and standard 100 nm typical resolution
The optical sensing element is applied as the core for position feedback. This product series is suitable for any application requiring high-precision positioning and motion control. It contains not only reliable and stable positioning abilities but also various resolution options.
Minimum incremental motion (Standard Linear Series)
Minimum incremental motion (High Precision Linear Series)