Semiconductor industry

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APPLICATIONS

Semiconductor Related Equipment、Inspection Equipment


PRODUCTS USED

Inductive piezo controller

Inductive piezo controller

1. Only compatible with the inductive piezo stage 2. Compact size 3. Expandable (Controller stackable) 4. Provides the axis quantity from 1 to 3 5. Customized design"

Inductive piezo controller

Optical piezo controller

Optical piezo controller

1. Only compatible with the optical piezo stage 2. Compact size 3. Expandable (Controller stackable) 4. Provides the axis quantity from 1 to 3 5. Selective control interface (USB/SMA) 6. Customized design

Optical piezo controller

Inductive piezo vertical stage

Inductive piezo vertical stage

1. Offers 1 kind of travel range which is 10 mm 2. The maximum loading is 150 g 3. 37 nm typical resolution"

Inductive piezo vertical stage

Inductive piezo linear stage

Inductive piezo linear stage

1. Offers 4 kinds of travel range (20mm / 28mm / 36mm / 44mm) 2. The maximum loading is up to 4 kg 3. 37 nm typical resolution​"

Inductive piezo linear stage

Optical piezo vertical stage

Optical piezo vertical stage

1. Offers 1 kind of travel range which is 10 mm 2. The maximum loading is 150 g 3. High-precision 1 nm and standard 100 nm typical resolution

Optical piezo vertical stage

BGX Conventional Linear Guides

BGX Conventional Linear Guides

1. High Accuracy 2. Low Noise 3. Smooth Traveling

BGX Conventional Linear Guides

MPH Series Retainer Type

MPH Series Retainer Type

1. Balanced load in 4 directions 2. Retainer Design 3. Smooth Movement 4. Compact Size"

MPH Series Retainer Type

MBC Cage type

MBC Cage type

1. Interchangeable to other brands 2. Cage optimizes lubrication 3. Ensuring high-accuracy design 4. Snap-in Dust-proof Components 5. Elastic Packing System to Ensure Precision"

MBC Cage type

Ball Screw FDI  Type

Ball Screw FDI Type

Internal Circulation Series

Ball Screw FDI Type

Ball Screw RSK  Type

Ball Screw RSK Type

Cylindrical Series

Ball Screw RSK Type

Ball Screw RSU Type

Ball Screw RSU Type

Low Voice Series

Ball Screw RSU Type

Ball Screw FSS Type

Ball Screw FSS Type

Low Voice Series

Ball Screw FSS Type