Semiconductor industry
APPLICATIONS
Semiconductor Related Equipment、Inspection Equipment
PRODUCTS USED
Inductive piezo controller
1. Only compatible with the inductive piezo stage
2. Compact size
3. Expandable (Controller stackable)
4. Provides the axis quantity from 1 to 3
5. Customized design"
Optical piezo controller
1. Only compatible with the optical piezo stage
2. Compact size
3. Expandable (Controller stackable)
4. Provides the axis quantity from 1 to 3
5. Selective control interface (USB/SMA)
6. Customized design
Inductive piezo vertical stage
1. Offers 1 kind of travel range which is 10 mm
2. The maximum loading is 150 g
3. 37 nm typical resolution"
Inductive piezo linear stage
1. Offers 4 kinds of travel range (20mm / 28mm / 36mm / 44mm)
2. The maximum loading is up to 4 kg
3. 37 nm typical resolution"
Optical piezo vertical stage
1. Offers 1 kind of travel range which is 10 mm
2. The maximum loading is 150 g
3. High-precision 1 nm and standard 100 nm typical resolution
BGX Conventional Linear Guides
1. High Accuracy
2. Low Noise
3. Smooth Traveling
MPH Series Retainer Type
1. Balanced load in 4 directions
2. Retainer Design
3. Smooth Movement
4. Compact Size"
MBC Cage type
1. Interchangeable to other brands
2. Cage optimizes lubrication
3. Ensuring high-accuracy design
4. Snap-in Dust-proof Components
5. Elastic Packing System to Ensure Precision"
